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Effect of Annealed Duration and Temperature on Crystallinity of Ta2O5 Thin Films

Sukaryo, Sulistioso Giat and Darmasetiawan, H. and Irzaman, Irzaman and Indro, M N (2012) Effect of Annealed Duration and Temperature on Crystallinity of Ta2O5 Thin Films. Kontribusi Fisika Indonesia, 13 (1).

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Item Type: Article
Subjects: Daur Bahan Bakar Nuklir dan Bahan Maju > Bahan Struktur dan Bahan Maju
Divisions: Pusat Sains dan Teknologi Bahan Maju
Depositing User: EDITOR PSTBM BATAN
Date Deposited: 02 Dec 2018 13:07
Last Modified: 02 Dec 2018 13:07
URI: http://repo-nkm.batan.go.id/id/eprint/7538

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